Titanium oxide thin films are prepared by the sol–gel technique with 172 nm vacuum ultraviolet (VUV) irradiation using a Xe2 * excimer lamp. The effect of VUV irradiation on spin-coated films was investigated by UV-visible absorption, X-ray photoelectron, Fourier transform infrared and Raman spectroscopies. The results showed that VUV irradiation causes the removal of hydroxyl and organic functional groups from the transparent coating film without causing the reduction of titanium, so that the film begins to transform into an oxide from a hydroxide. It was found that VUV irradiation onto a dried coating film is effective in accelerating the formation of Ti–O networks and crystallization.
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Naganuma et al. (2004) studied this question.
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