We present an improved reaction patterning technique to fabricate very stable thin film devices of YBaCuO on various substrates. Our approach includes in situ patterning and completely avoids the contact between YBaCuO superconductor and chemical or physical etchants. Very thin, high quality YBaCuO structures are grown on ridges or in trenches and in situ protected by passivating layers, demonstrating excellent long term stability.
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Copetti et al. (1992) studied this question.
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