Dense lead zirconate titanate (PZT) films in the thickness range of 2–100 µm were fabricated by the aerosol deposition method (ADM) to study the thickness dependence of the ferroelectric characteristics. The recovery of ferroelectricity by annealing is uniform inside a thick PZT film. Breakdown electrical field increased with decreasing thickness of the film and was over 1 MV/cm for a 4-µm-thick PZT film. Increase of the internal stress for thinner PZT films led to the increase of the coercive field and breakdown electrical strength.
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Lebedev et al. (2002) studied this question.
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