High-resolution surface charge image achieved by a multiforce sensor based on a quartz tuning fork in electrostatic force microscope

A multiforce sensor was fabricated by attaching a tiny tungsten tip to a tuning fork. By operating an ac modulation bias on the minitip of the needle sensor, we have achieved a dynamic noncontact mode electrostatic force microscope with high spatial resolution. It can utilize the van der Waals force and electrostatic force signals between the microtip and the sample, respectively, to obtain the images of topography and quantitative surface charge density of an open-gate field effect transistor simultaneously.