Core Level XPS Spectra of Cr and N in Chromium Nitride Films

Chromium nitride thin films have interesting properties, such as oxidation resistance, corrosion resistance, and wear behavior. In the present investigation, x-ray photoelectron spectroscopy has been employed to record the core levels of Cr and N in chromium nitride (CrNx, x = 0.2, 0.4, 0.8, and 1.0) films. These films have been deposited with varying concentrations of nitrogen on a stainless steel substrate by a dc magnetron sputtering technique. Mg Kα radiation has been employed to record the spectra. The XPS data in the Cr 2p and N 1s regions are presented.