Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron microscope

This is the authors' abstract. We don't add key points for this paper.

We demonstrate the use of piezoresistive cantilevers with an atomic force microscope that operates in conjunction with a scanning electron microscope. This is a very attractive combination because the two microscopes complement each other in terms of depth and lateral resolution, field of view, speed, and ability to image insulating surfaces. Images of a grating and an integrated circuit are shown as examples. Simultaneous operation in real time was achieved.