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A three-dimensional (3D) simulation for micropowder blasting was carried out for the first time to predict the convex corner structure of a processed glass substrate with patterned mask erosion. The simulator utilized a cellular automaton algorithm which consisted of combinations of two orthogonal planes of two-dimensional (2D) cells and a solid particle erosion model. It was confirmed that the effect of erosion at the convex corner of the mask on the glass processing profile, which cannot be predicted in the previous 2D simulation, was successfully simulated using our 3D simulator.
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Yagyu et al. (2008) studied this question.
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