We report studies of local mode vibrations in hydrogenated a-Si alloy films, presenting new information obtained by comparisons with similar alloy films in which deuterium is substituted for hydrogen. We discuss three systems, a-Si:H(D), a-Si:[H(D),O], and a-Si:[H(D),N], and emphasize changes in the atomic displacements and frequencies of the local mode vibrations with deuteration.
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Lucovsky et al. (1984) studied this question.