Application of X‐ray‐induced Auger electron spectroscopy to state analyses of hydrogen implanted in Y, Zr and Nb metals

X‐ray‐induced Auger electron spectroscopy (XAES) was used to examine the surface chemical states of hydrogen implanted metals. The chemical shifts of the M 4,5 N 2,3 V Auger peaks from their metallic states were 1.0 eV, 3.3 eV and 2.2 eV, respectively, for ion‐implanted Y, Zr and Nb. The separation energies were found to be much larger than those of the corresponding 3d 5/2 lines in the XPS spectra.