Structural and Electrical Properties of Amorphous Hydrogen Carbon–Nitrogen Films

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Amorphous hydrogenated carbon–nitrogen (a-C:H:(N)) films with different nitrogen contents have been deposited by using rf-sputtering of a high purity graphite target in an Ar–H 2 –N 2 atmosphere. Transmittance and reflectance spectra are used to characterize the Tauc gap and absorption coefficients in the wavelength range 0.185–3.2 μm. The temperature dependence of conductivity demonstrates a hopping mechanism of the Fermi level in the temperature range of 77–300 K. The density of state at the Fermi level is derived from the direct current conductivity. The photoluminescence properties of a-C:H:N films were investigated. The photoluminescence peak has a blue shift with increasing excitation energy. These results are discussed on the basis of a model in which the different sp 2 clusters dispersed in sp 3 matrices.