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We apply the rigorous electromagnetic grating theory and an electromagnetic wave-propagation model with Kirchhoff boundary conditions to analyze and optimize the performance of arrays of cylindrical dielectric multilevel diffractive lenses. We show that the diffraction efficiency of a high-numerical-aperture lens array can be improved if the surface-relief profile is constructed with the use of rigorously optimized grating groove structures, which differ significantly from a multilevel approximation of a triangular profile.
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Noponen et al. (1993) studied this question.
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