Experimental study demonstrates a waveguide measurement method for ferroelectric thin films, highlighting enhanced microwave property characterization using custom data processing.
A method for measuring of microwave properties at ferroelectric thin films has been developed. Studied films are deposited onto dielectric substrates, and film-on-substrate "sandwich" is arranged along waveguide. S 11 ( f ) or S 21 ( f ) dependences are studied depending on sensitivity. Redundant measured data processed with specially developed software.
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Kazmirenko et al. (2003) studied this question.
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