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A hot filament chemical vapor deposition method has been developed to grow vertical array single-walled carbon nanotubes (SWNTs). In this study, a hot filament (temperature greater than 2000 degrees C) was used to activate gas mixtures of hydrogen and carbon containing species at sub-atmospheric pressures. Silicon substrates decorated with islands of iron were directly inserted into a preheated furnace in which a hot filament is activating the gas. Vertical arrays of SWNTs are produced with diameters ranging from 0.78 to 1.6 nm. The samples were characterized with Raman and fluorescence spectroscopy and SEM and TEM microscopy.
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Xu et al. (2006) studied this question.
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