Phase transition in YBa2Cu3O7-x through hydrogen ion implantation was investigated by means of X-ray diffraction. It was found that the orthorhombic-to-tetragonal phase transition was induced by the implantations in the ion fluences of 7.6×1016 H+/cm2 and above. At the 2.3×1017 H+/cm2 implantation, the extra phases Y2BaCuO5 and CuO were also formed. These phenomena suggested that the implanted hydrogen atoms deoxidized the YBa2Cu3O7-x to produce H2O which reacted with YBa2Cu3O7-x .
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Kato et al. (1988) studied this question.
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