Structure and superconducting properties of sputtered Gd-Ba-Cu-O thin films

Superconducting Gd-Ba-Cu-O thin films were deposited on MgO substrates by rf magnetron sputtering. Preparation temperature dependence on the crystallization behavior and on the superconductive properties of this film have been investigated in correlation with the target-substrate spacing. A sharp superconducting transition with an onset temperature at 94 K and zero resistance (zero ρ) at 86 K was obtained at a substrate temperature of 600 °C with a target-substrate spacing of 25 mm.