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A CVD process was developed for producing 63 Ni-based atomic batteries by deposition of active 63 Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63 Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support temperature and working pressure on the characteristics of the 63 Ni coating was examined.
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Kharitonov et al. (2018) studied this question.
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