K0.5Na0.5NbO3 Thin Films Prepared by Chemical Solution Deposition

The thin films of potassium sodium niobate (K 0.5 Na 0.5 )NbO 3 on Pt(111)/TiO 2 /SiO 2 /Si substrates have been prepared by chemical solution deposition. The stoichiometric sols were synthesized from corresponding alkali metal ethoxides or acetates and niobium ethoxide in 2-methoxyethanol. The thin film quality is affected by choice of alkali metal precursors. Thin films prepared from the acetate-based sol upon heating to 670°C crystallize in pure perovskite phase. The dielectric permittivity of the 350 nm thick KNN film at 10 kHz is 533 and the dielectric loss factor is 0.068.