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November 1, 1992Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Study of fluorine (XeF2) adsorption and of oxygen/fluorine coadsorption on silicon using infrared reflection absorption spectroscopy

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VBV. M. BermudezUnited States Naval Research Laboratory

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V. M. Bermudez (1992) studied this question.

synapsesocial.com/papers/6aa6ed3739a5015a928e648dhttps://doi.org/10.1116/1.577806
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