Gold-enhanced oxidation of MBE-grown silicon nanowires

Thermal oxidation of MBE-grown silicon nanowires with a gold droplet on their tips was investigated. Two kinds of oxidation behavior were observed: (i) enhanced axial oxidation , if there was a direct contact between the gold droplet and the nanowire, and (ii) conventional oxidation for nanowires when there was no direct contact between the gold and silicon. For a dry atmosphere, such enhanced oxidation takes place at temperatures down to 500 °C. Under a wet atmosphere, remarkable oxidation was observed even for temperatures down to 250 °C.