Ultraviolet metalens and metalens array of focused vortex beams

The solar-blind ultraviolet (UV) wavelength is particularly interesting within the range of 200 nm–300 nm. Here, we propose a focusing metalens, focusing vortex beam (VB) metalens and metalens array that specifically work in the UV band to focus a beam or VB. Firstly, a high numerical aperture (NA) focusing metalens working at a wavelength of 214.2 nm was designed, and the NA reached 0.83. The corresponding conversion efficiency of the unit structure reached as high as 94%, and the full width at half maximum was only 117.2 nm. Metalenses with large NA can act as optical tweezers and can be applied to trap ultracold atoms and molecules. Secondly, a focused VB metalens in the wavelength range of 200 nm–300 nm was also designed, which can convert polarized light into a VB and focus the VB simultaneously. Finally, a metalens array was developed to focus VBs with different topological charges on the same focal plane. This series of UV metalenses could be widely used in UV microscopy, photolithography, photonics communication, etc.