Answers are grounded in this paper and cite their sources.
Reliability of MEMS is essential to its successful application. This paper focused on the failure mode of MEMS, the reliability test and modeling of MEMS and the reliability test method of typical devices. Designing of MEMS reliability is discussed based on the review of MEMS reliability test and the failure model of MEMS reliability. In this paper, firstly, recent development in MEMS reliability field is elaborated. Secondly, research of MEMS reliability aimed at different typical MEMS mechanism and devices is summarized in three major areas: several common kinds of the failure mode of MEMS, MEMS reliability model and MEMS reliability test of typical MEMS mechanism and devices. Finally, the main direction of MEMS research and the research trend in the future is discussed.
No takes yet. Share an insight, caveat, or question.
Hu et al. (2014) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: