A silicon wafer was modified by chemisorption of a monolayer of a cation precursor and exposed to blue light through a mask. In the regions exposed to blue light, the cation precursor was converted to cation. These cations were recognized and bound selectively by nanoparticles modified by adsorption of crown. As a consequence, these crown-modified nanoparticles were adsorbed at only the desired regions and pattern transfer was affected.
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Ryan et al. (2004) studied this question.
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