This letter reports the utility of using the sol-gel process for exploring the library of multicomponent ZnO-based oxides as an active layer of thin film transistors. We chose InGaZnO as a starting material and modulated the Ga content to examine the potential of this material. Increasing the Ga ratio from 0.1 to 1 brought about a dynamic shift in the electrical behavior from conductor to semiconductor. This exploratory work critically helped us fabricate a device with robust device performance (a mobility of 1∼2 cm2 V−1 s−1 for the 400 °C-sintered samples and 0.2 cm2 V−1 s−1 for the 300 °C-sintered samples).
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Lim et al. (2009) studied this question.
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