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August 1, 1982Journal of Applied Physics

The material state of ion-implanted Cr in GaAs

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Authors

PPP. P. PronkoUniversity of MichiganAKA. K.National Central UniversityOHO. W. HollandOak Ridge National Laboratory

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Pronko et al. (1982) studied this question.

synapsesocial.com/papers/6aa8daa816ab452aa7a419cbhttps://doi.org/10.1063/1.331444
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Also Consider

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  1. 1Stoichiometric disturbances in ion implanted GaAs and redistribution of Cr during annealing1981 · 33 citations
  2. 2Chromium concentrations, depth distributions, and diffusion coefficient in bulk and epitaxial GaAs and in Si1980 · 41 citations
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  4. 4As-implanted and redistributed annealed depth distributions, range-energy data, and shape factors for Cr implanted into crystalline GaAs and Si1981 · 15 citations
  5. 5Damage gettering of Cr during the annealing of Cr and S implants in semi-insulating GaAs1980 · 23 citations