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November 1, 1994Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

High-performance multilevel blazed x-ray microscopy Fresnel zone plates: Fabricated using x-ray lithography

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Authors

EFEnzo Di FabrizioPolytechnic University of TurinMGM. GentiliFerioli & Gianotti (Italy)LGL. GrellaUK Power Networks

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Cite This Study

Fabrizio et al. (1994) studied this question.

synapsesocial.com/papers/6aa8f46d39e8b1c7dca33bc3https://doi.org/10.1116/1.587414
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