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Narrative review demonstrates advances in photolithography and FinFET architecture in semiconductor manufacturing, highlighting challenges in maintaining Moore's law integration rates.
The semiconductor devices industry is one of the most significant sectors, based on its broad applications and substantial economic and strategic implications.This article overviews the emerging technologies in transistor manufacturing processes, materials, and architectures.It discusses the latest trends in photo-lithography processes, focusing on extreme ultraviolet (EUV) lithography; at the transistor architectural level, the article discusses various transistor types, emphasizing fin field-effect transistor (FinFET) structure and properties.The article also briefs the latest semiconductor developing road map, promises, and challenges toward keeping up with Moore's integration rate.
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Kamal Kamal (2022) studied this question.
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