All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range

Pressure-temperature cross-sensitivity and its accompanying temperature-related stability is a nerve-wracking obstruction for pressure sensor performance in a wide temperature range. To solve this problem, we propose a novel (to the best of our knowledge) all-silicon dual-cavity optical Fabry–Perot interferometer (FPI) pressure sensor. The all-silicon structure has high intrinsic reflectivity and is able to eliminate the influence of thermal-expansion-mismatch-induced stress and chemical-reaction-induced gas generation, and therefore, in essence, enhances measurement accuracy. From the experiment results, the pressure-temperature cross-sensitivity is reduced to be ∼ 5.96 Pa / ° C , which presents the lowest pressure-temperature cross-sensitivity among the FPI pressure sensors with the capability of surviving high temperatures up to 700°C thereby opening the way for high-precision pressure monitoring in various harsh and remote environments.