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March 1, 1991Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Micropattern measurement with an atomic force microscope

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Authors

TFTôru FujiiEssilor (Germany)MSMichiko SuzukiIwate Medical UniversityMMM. MiyashitaTokyo University of Science

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Cite This Study

Fujii et al. (1991) studied this question.

synapsesocial.com/papers/6aab3f27fbe670e898f8df46https://doi.org/10.1116/1.585483
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