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The nanoindentation behaviour of a substrate glass to a depth of only 5 nm is examined by using a nanoindentation instrument with a load resolution of 0·1 μN and a displacement resolution of 0·08 nmrms. The instrument is capable of detecting contact of the indenter tip with the sample surface with the accuracy of ± 0·2 nm when operated under displacement controlled conditions. The experimental results are analysed using a three-dimensional finite-element method on a truncated Berkovich pyramidal indentation.
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Shimamoto et al. (1996) studied this question.
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