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September 1, 1996Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

High resolution patterning of thin magnetic films to produce ultrasmall magnetic elements

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Authors

BKB. KhamsehpourWestern Digital (United States)CWC. D. W. WilkinsonUniversity of Glasgow JCJ. N. ChapmanUniversity of Glasgow

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Khamsehpour et al. (1996) studied this question.

synapsesocial.com/papers/6aabafb085a0ed6964ca31a0 https://doi.org/10.1116/1.588536

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