Implanted targets of

In this work, 84Kr ions were implanted into a carbon-based thin film (1.5 × 1.5 cm2 of surface area and a thickness of 50 µm purely carbon) with a thin Au overlayer (approximately 100 nm thick). The aimed implantation areal density is 1017 atoms/cm2 which represents a target that is thin enough to study nuclear reactions at a specific energy while thick enough to offer enough target nuclei to the incident beam during such studies. The evolution of the target and its matrix during irradiation were monitored in situ by Rutherford Backscattering Spectormetry (RBS) using a PIPS detector placed at 135° scattering angle to enhance mass resolution for heavy ions. Spectral data were analyzed with the SIMNRA codes to obtain quantitative depth profiles of Kr, C, and Au, evaluate the efficiency, and track structural modifications as fluence increases. This combined approach provides a robust framework to study irradiation-induced mass transport and stability in complex multilayer thin-film systems.