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December 1, 1983Applied Optics

Low-loss optical waveguides using plasma-deposited silicon nitride

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Authors

SSS. SriramIndian Institute of AstrophysicsWPW. D. PartlowNorthrop Grumman (United States)CLC. S. LiuUniversity of Minnesota System

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Sriram et al. (1983) studied this question.

synapsesocial.com/papers/6aabbaa995b10025d1a8b985https://doi.org/10.1364/ao.22.003664
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Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Silicon nitride films on silicon for optical waveguides1977 · 151 citations
  2. 2Light Waves in Thin Films and Integrated Optics1971 · 1,092 citations