Tungsten nitride ( W 2 N ) film has been prepared by chemical vapor deposition using tungsten hexafluoride ( WF 6 ) , ammonium ( NH 3 ) , and hydrogen gas ( H 2 ) . W 2 N film with metallic luster is obtained at 450°–600°C in the molar ratio of WF 6 : NH 3 : H 2 = 1 : 4 : 1 – 2 . Crystallite size of W 2 N increases with increasing temperature from 450° to 650°C. SEM observation indicates that the size of W 2 N particles in the film increases according to the change in crystallite size. ESCA spectra show that W‒N bond of W 2 N has an ionic character, W δ+ ‐ N δ− .
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Nakajima et al. (1987) studied this question.