During artificial Al∕Si(111)-7×7 nanocluster fabrication by using surface-mediated clustering, original step with an atomically straight edge becomes curved and irregular because of stronger attractive interaction between Al atoms and Si atoms. Surface residual strain around step edges has been studied by using digital geometric phase technique. The results show that the residual strain is compressive and there is larger compressive stress near both of the up and down step edges.
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Liu et al. (2005) studied this question.
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