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We study x-ray diffraction peak profiles from highly mismatched relaxed epitaxial films at momentum transfers exceeding the peak widths. Calculated profiles for misfit dislocations are compared with triple-crystal diffraction profiles from GaAs/Si(001) epitaxial films. We find that the longitudinal and transverse scans have a common q−4 asymptote but approach it differently, so that their profiles are qualitatively different in the experimentally available momentum range. The possible contribution from threading dislocations is estimated.
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Kaganer et al. (2006) studied this question.
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