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Organic light-emitting diodes (OLEDs) continue to receive attention due to their potential applications in display technology. Indium tin oxide is currently the most widely used anode material in these devices. Here is reported the preparation of highly conductive thin films of TiN on glass substrates by metal organic CVD using Ti(NMe2)4 and NH3. These films were used as anodes in small-molecule based OLEDs that showed external quantum efficiencies comparable to or better than those fabricated with ITO. The efficiencies improve significantly when corrected for absorption by the TiN.
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Adamovich et al. (1999) studied this question.
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