For GD-OES the sputtering rate of standard reference materials is needed for calibration purposes. A modern optical profilometer is used to measure 3D crater profiles. The crater volume, the erosion and the sputtering rate is calculated. A series of measurements was performed at reference materials and different plasma conditions. The plot of the reduced sputtering rates versus voltage proves the validity of the Boumans formula.
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Wilken et al. (2003) studied this question.
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