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The moisture‐induced corrosion of an evaporated germanium film has been observed and studied using quantitative X‐ray photoelectron spectromicroscopy. The application of recently reported software for the processing of multi‐spectral image datasets (particularly noise reduction) to this real‐world problem revealed the formation of oxide islands above the continuous passive oxide layer. The software has been developed to map the thickness of these structures within the XPS sampling depth, with a spatial resolution of a few microns. This exemplifies a characterisation methodology of use in any situation where (non‐uniform) surface modification results in chemically shifted components of the same core level (or Auger peak) between the original substrate and new overlayer.
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Smith et al. (2005) studied this question.
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