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An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N2 as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.
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Zhang et al. (2014) studied this question.
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