Design, Fabrication, and Characterization of a High Fill-Factor, Large Scan-Angle, Two-Axis Scanner Array Driven by a Leverage Mechanism

We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles arepm 6.7ᶜircat 75 V for both axes, leading to total optical scan angle of 26.8ᶜirc. The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for1times N ²wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7$mu m$is also attained.1731