The use of surface profilometers for the measurement of wafer curvature

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation M. E. Thomas, M. P. Hartnett, J. E. McKay; The use of surface profilometers for the measurement of wafer curvature. Journal of Vacuum Science & Technology A 1 July 1988; 6 (4): 2570–2571. https://doi.org/10.1116/1.575550 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search