The catalytic decomposition of RuO 2 with the help of Ru in the film played the crucial role for the increase in the active oxygen, which results that the growth per cycle of TiO 2 at the initial growth stage was drastically increased on RuO x (RuO 2 /Ru mixture) compared to Ru and RuO 2 .
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Jeon et al. (2014) studied this question.
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