Integrating anti-reflection and superhydrophobicity of moth-eye-like surface morphology on a large-area flexible substrate

This paper proposes an ultraviolet nanoimprint lithography (UV-NIL) roll-to-roll (R2R) process with argon and oxygen (Ar–O 2 ) plasma ashing and coating of a dilute perfluorodecyltrichlorosilane (FDTS) layer to fabricate the large-area moth-eye-like surface morphology on a polyethylene terephthalate substrate. By using Maxwell-Garnett's effective medium theory, the optimal dimensions of the moth-eye-like surface morphology was designed and fabricated with UV-NIL R2R process to obtain maximum transmittance ratio. In addition, the base angle ( θ = 30.1°) of the moth-eye-like surface morphology was modified with Ar–O 2 plasma ashing and coated with a dilute FDTS layer to possess both superhydrophobic and air-retention properties. This increases both the transmittance ratio of 4% and contact angle to 153°.