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May 13, 1996Applied Physics Letters

Growth of fluorocarbon polymer thin films with high CF2 fractions and low dangling bond concentrations by thermal chemical vapor deposition

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Authors

SLScott J. LimbPalo Alto Research CenterCLCatherine B. LabelleIntel (United States)KGKaren K. GleasonIIT@MIT

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Limb et al. (1996) studied this question.

synapsesocial.com/papers/6aae45219bbf973f2f76f33dhttps://doi.org/10.1063/1.116332
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