ESCA and optical emission study of the inductively coupled RF plasma copolymerization of naphthalene and octafluoronaphthalene mixtures

Plasma polymerization of octafluoronaphthalene, naphthalene, and 1 : 1 mixtures of the two yielded thin films which were then analyzed by ESCA. Optical emission was recorded during deposition and the resultant spectra are shown. Deposition of the copolymer at 150°C resulted in a film whose composition was different from that deposited at room temperature and from the single plasma polymers. Copolymerization resulted in a lowering of CF2 functionalities and an increased retention of the aromatic nature of the monomers. Optical emission of CF2 during copolymerization was greatly reduced as was a peak at about 510 nm.