Implantation, Diffusion, Activation, and Recrystallization of Gallium Implanted in Preamorphized and Crystalline Germanium, Hellings, Geert, Wuendisch, Clemens, Eneman, Geert, Simoen, Eddy, Clarysse, Trudo, Meuris, Marc, Vandervorst, Wilfried, Posselt, Matthias, De Meyer, Kristin
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Hellings et al. (2009) studied this question.
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