The coatings investigated in this paper were deposited via the magnetron sputtering of AlNTiB2TiSi2 target in Ar atmosphere.The investigation of structural-phase composition, element composition, morphology and mechanical properties before and after annealing up to 1350• C was carried out.The concentration of elements in the coating was changed after annealing at 900 • C and further annealing at 1350 • C (especially after annealing at 1350 • C).The hardness of as-deposited coatings was 15 GPa, but after annealing at 1350 • C the value of hardness increased up to 22 ÷ 23.5 GPa.The value of the viscoplastic index was 0.07.All this provide high damping properties of the coating, and amorphous-like structure makes promising the use of these coatings as diusion barriers in the form of independent elements, and as a contacting layer in multilayer wear resistant coatings.
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Pogrebnjak et al. (2014) studied this question.
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