An optical scanner consisting of a unimorph giant-magnetostrictive Tb-Fe alloy film was prepared by DC magnetron sputtering. The Tb-Fe alloy film was deposited onto a polyimide substrate and an Al thin film on the untreated surface of the polyimide substrate served as a reflecting mirror. Optical scanning characteristics of the device were examined by a bending cantilever method using a He-Ne LASER under a magnetic field. The device showed reflection angle displacement of 1.3 degrees of along the x axis and 1.6 degree along the y axis at 1100 kA/m. An applied magnetic field in range from 20 to 500 kA/m reproducibility produces a reversible linear displacement. Based on the results, the Tb-Fe alloy film device could be applied as an optical sensor.
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Kadowaki et al. (2004) studied this question.
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