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July 10, 1997Applied Optics

Excimer laser micromachining for rapid fabrication of diffractive optical elements

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GBGregory P. BehrmannMDMichael T. Duignan

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Behrmann et al. (1997) studied this question.

synapsesocial.com/papers/6aaf6e4c327e2162f5d06901https://doi.org/10.1364/ao.36.004666
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