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Fabricate microfiltration membrane sieves using silicon micromachining techniques and determine their mechanical deflection and maximum load capacity.

March 1, 1997Journal of Microelectromechanical SystemsOpen Access

Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining

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Fabricate microfiltration membrane sieves using silicon micromachining techniques and determine their mechanical deflection and maximum load capacity.
Deposited a 1 µm thick silicon nitride layer onto an initially dense silicon wafer using low-pressure chemical vapor deposition (LPCVD).
Patterned perforations ranging from 0.5 µm to 10 µm in diameter across the membrane using photolithography and reactive ion etching (RIE) over 1000 µm wafer openings.
Calculated deflection and maximum load limits using first-approximation mathematical models and validated them through load-bearing experiments on silicon-rich silicon nitride membranes.
Mathematical first approximations provided analytical formulas for evaluating mechanical deflection and bursting load thresholds in perforated membranes.
Experimental measurements of maximum load in silicon-rich silicon nitride membranes confirmed the accuracy of the theoretical approximations.

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Implication

Experimental study demonstrates deflection mechanics and maximum load capacity in micromachined silicon nitride sieves, confirming theoretical structural models.

Cite This Study

Rijn et al. (1997) studied this question.

synapsesocial.com/papers/6aaf76268976e698ef35124e https://doi.org/10.1109/84.557530

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Implication

Experimental study demonstrates deflection mechanics and maximum load capacity in micromachined silicon nitride sieves, confirming theoretical structural models.

Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining

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Implication

Cite This Study

Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining

Key Points

Discussion

Implication

Cite This Study

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